Micro-and Nanoelectronics : Emerging Device Challenges and Solutions

Providing a good representation of the current state of a complex engineering field ranging from fundamental science and material properties to novel ways of making nano devices, this text is divided into three parts. The first part deals with device technology, covering graphene, SiGe, and silicon processes. The second part describes cutting-edge silicon devices, including SOI, various 3D integration, and memristor technologies that will carry silicon going forward. The third part of the book examines emerging materials with the potential to shape the future of nanotechnology.