Plasma Electronics : Applications in Microelectronic Device Fabrication : 2E
Together with solids, liquids, and gas, plasmas make up one of the four fundamental states of matter. Because plasmas conduct electricity and can be efficient radiation sources, they are applicable to many diverse fields. The book reflects the growing importance of computer-aided approaches to plasma analysis and synthesis, and emphasizes presentation of practical algorithms and techniques. It showcases the advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and biological sciences. This second edition is an indispensable tool for anyone learning about plasma structure, function, and applications.